Rapid Thermal Annealer

Make/model	JIPELEC, Jetfirst 300 RTP Processor 3 x 400V.
Details	Annealing of metal-semiconductor contacts over 300mm with a controlled N2 or O2 atmosphere. Thermocouple or pyrometer temperature control upto 1200 °C.
Facility	Institute for Compound Semiconductors
School	Physics and Astronomy

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