Atomic Layer Deposition (ALD)
| Make/model | Beneq, ALD, Thin Film System TFS200. |
|---|---|
| Details | From summer 2019: ALD deposition of TiO2, TiN, Ta2O5, Al2O3, ZnO, SiO2, SiN, NiO, ITO, MoO. |
| Facility | Institute for Compound Semiconductors |
| School | Physics and Astronomy |
Get in touch
Saleem Shabbir
Location
Queen's Buildings
5 The Parade
Newport Road
CF24 3AA
5 The Parade
Newport Road
CF24 3AA